Photo resist Remover

This product which is produced for the first time in Iran is used to remove both positive and negative tone resist. The remover is able to remove Conventional resists such as Shipley 1813, KMPR, and SU8… After removing the resist a clean residue free surface is archived.

Photo resist Developer

It is used to develop patterns on both positive and negative resist coated. It results in dear images with no residue left in compare to NaOH. The minimum achievable resolution is 1µm

Synthesis & Preserving Metal Nano Particles

MEMS lab has the experience of synthesis and preserving gold and silver Nano particles for research purposes. Currently the members are working on cupper particles.

Large Area Mask less Photo Polymerization (LAMP)

This project is targeted to print ceramics for precision casting. The process is mainly adopted from stereo lithography. Ceramic slurry is exposed to UV light through a pattern. The exposed layer is the solidified to achieve the desired precision a machine based on MEMS stopper was designed employing MEMS DMDs. For more information one can refer to the following papers:

MEMs Accelerometer

This project started with a feasibility study to design and fabricate a MEMs accelerometer with the sensing range of 25 g with the support of Ministry of Culture and Education. Later this project was upgraded to another product with the capability of measure up to 100g acceleration. The project was primarily targeted for automotive industry.

G Switch

This sensor is initially designed for automative industry to functionalize air bag sustem. this system is designed in such a way that at a preset acceleration,the switch trigers. 20 of these sensors were built abd tested successfully


›         To remove carbon particles away from surface

›         Cleaning of hard to replace parts

›         Turbo charge in rail road industry

Spill Kit

Right now when Spill takes place a large volume of water is applied to dilute the liquid and the area is cleaned with detergents. When acid and bases are diluted their activity usually increases and due to increases of the volume it spreads all over the surface. Getting into contact with electric leads and plug,a high chance for spark to occur and developing fire exist. In addition the diluted acid (base) in contact with any cloth may cause heat. It also causes corrosion on metal surfaces. In order to fight spill accidents,currently fire department uses water and sand.
This material (produced in MEMs lab),will have a much higher absorption rate than sand. It is not flammable and it neutralizes both acids and bases. Once it’s applied,it neutralizes the spill and makes it dry and ineffective. Later the dray can be sweeped.

Grease Remover

Greases are used mainly for lubrication and mechanical ware reduction and surface protection. It prolongs service life of mechanical or electromechanical industrial parts. However greases capture and absorb the unwanted material and dirt. The spent grease should be removed from the gears and bearings,and replaced with fresh grease. Cleaning means dissolving and removing spent grease. In cleaning we may use “water + soaps or organic solvents” or “soaps and Surface Active Agents”. While AUT-ADG grease cleaner can be used for repair and cleaning of heavy machinery such as locomotives and alike,it can be used to clean large chemical and pharmaceutical equipment used for production. The product has the following specifications:

›      It has high capacity for salvation and is suitable using for repeated applications

›   AUT-ADG has a high capacity for solvation; therefore it can reduce the consumption and costs.

›    It has a much longer usage-life-time,substantially better than a number of products

›     From environmental and human safety point of view it is used in various forms in production over 30 years

Paint Remover

This formulation is designed for removal or paints,organic-protective layer from a variety of substrate. The product is designed to remove thick paint and protective layers without dissolving baked paint by penetrating bonding between surfaces and paint. Mechanism of paint removal begins by diffusion of the solvent between surface and paint /protective layer. The lift-off solution is water miscible and may be used repeatedly. This product is designed for several repeated use. XP-Paint Stripper consists of a combination of organic material and water. Its effective process range is from 60c to about 110c. Its removal rate increases with the process temperature. The coated items are fully immersed into a solvent bath,fully covered in the Solution. The process bath with solvent in it should be operated at 80⁰C to 100 ⁰C. Depending upon the number coated layers; process time will be 4 to 24 hrs. The solution should be used as received. To replenish the bath due to evaporation loss,add the lost volume of the solvent using fresh material. Solvent loss is due to drag-out and some evaporation. This product is not evaluated as flammable.

Mask Fabrication Service

This censor offers mask fabrication service up to the resolution of 2mm

Design and Fabrication of Wet Bench

MEMs lab is capable of design and fabrication of wet benches. The lab is also capable of offering wet etching service for Si,SiO2,Cr,Au.


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  • Design and fabrication of electrochemical etching
  • Fabrication of bio-inspired adherent micro/nano-mechanism
  • Design and fabrication of constant force micro-gripper
  • Rigid microneedle (polymer)
  • Hollow microneedle (silicon)
  • Water-proof long-time micro-timer with low power consumption
  • Design and fabrication of capsular micro-robot with IPMC drives.
  • Fabrication of Porosilicon
  • Fabrication of artificial muscle based on active nanocomposites
  • Design and fabrication of Explosive lock
  • Anti-dust and water proof nano-coatings
  • Design of micro-gyroscope
  • Design and fabrication of contact printer
  • Design and fabrication of porous silicon.
  • Design and fabrication of micro needle for blood sampling.
    Gas sensor
  • Design and fabrication of capsular robots with IMPC actuator